衬底温度对直流磁控溅射沉积AlN薄膜组织结构的影响
刘新胜, 周灵平, 门海泉, 李德意, 李绍禄
Effect of Substrate Temperature on Texture and Structure of AlN Thin Films Deposited by DC Magnetron Sputtering
LIU Xin-sheng, ZHOU Ling-ping, MEN Hai-quan, LI De-yi, LI Shao-lu
矿冶工程
.
2007, (3): 82
-85
.
