模压成型压力对氧化铟锡(ITO)靶材性能影响研究
姜峰, 谭泽旦, 黄誓成, 方志杰, 陆映东, 覃立仁, 王永清, 曾纪术
Effects of Molding Pressure on Properties of Indium Tin Oxide (ITO) Sputtering Target
JIANG Feng, TAN Zedan, HUANG Shicheng, FANG Zhijie, LU Yingdong, QIN Liren, WANG Yongqing, ZENG Jishu
矿冶工程
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2024, (1): 134
-137
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DOI: 10.3969/j.issn.0253-6099.2024.01.029
