DND@CeO2核壳型磨料的制备及其在蓝宝石表面的抛光机理研究
周晨, 许向阳, 林顺天, 姚云飞
Preparation of DND@CeO2 Core-Shell Abrasives and Their Chemical Mechanical Polishing Performances on Sapphire Wafers
ZHOU Chen, XU Xiang-yang, LIN Shun-tian, YAO Yun-fei
矿冶工程
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2021, (2): 115
-120
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DOI: 10.3969/j.issn.0253-6099.2021.02.028
