烧结温度对放电等离子烧结法制备IGZO靶材 的影响研究
苏文俊, 陈坚, 袁振宇, 袁铁锤, 肖松文
Effects of Sintering Temperature on IGZO Targets Prepared by Spark Plasma Sintering
SU Wen-jun, CHEN Jian, YUAN Zhen-yu, YUAN Tie-chui, XIAO Song-wen
矿冶工程
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2016, (1): 114
-116
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DOI: 10.3969/j.issn.0253-6099.2016.01.029
