Effects of Sintering Temperature on IGZO Targets Prepared by Spark Plasma Sintering

SU Wen-jun, CHEN Jian, YUAN Zhen-yu, YUAN Tie-chui, XIAO Song-wen

Mining and Metallurgical Engineering ›› 2016, Vol. 36 ›› Issue (1) : 114-116.

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Mining and Metallurgical Engineering ›› 2016, Vol. 36 ›› Issue (1) : 114-116. DOI: 10.3969/j.issn.0253-6099.2016.01.029

Effects of Sintering Temperature on IGZO Targets Prepared by Spark Plasma Sintering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 36(1): 114-116 https://doi.org/10.3969/j.issn.0253-6099.2016.01.029

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