Preparation of DND@CeO<sub>2</sub> Core-Shell Abrasives and Their Chemical Mechanical Polishing Performances on Sapphire Wafers

doi:10.3969/j.issn.0253-6099.2021.02.028

Preparation of DND@CeO₂ Core-Shell Abrasives and Their Chemical Mechanical Polishing Performances on Sapphire Wafers

ZHOU Chen, XU Xiang-yang, LIN Shun-tian, YAO Yun-fei

Mining and Metallurgical Engineering ›› 2021, Vol. 41 ›› Issue (2) : 115-120.

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Mining and Metallurgical Engineering ›› 2021, Vol. 41 ›› Issue (2) : 115-120. DOI: 10.3969/j.issn.0253-6099.2021.02.028

Preparation of DND@CeO₂ Core-Shell Abrasives and Their Chemical Mechanical Polishing Performances on Sapphire Wafers

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2021, 41(2): 115-120 https://doi.org/10.3969/j.issn.0253-6099.2021.02.028

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Received	Published
2020-10-27	2021-04-25
Issue Date
2021-04-25

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