INTRINSIC STRESS IN DIAMOND FILM GROWTH BY HOT-FILAMENT CVD

Zhao Nanfang, Yang Qiaoquin, Zhao Lihua, Li Deyi, Xiao Hanning

Mining and Metallurgical Engineering ›› 1998, Vol. 18 ›› Issue (3) : 67-69.

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PDF(105 KB)
Mining and Metallurgical Engineering ›› 1998, Vol. 18 ›› Issue (3) : 67-69.

INTRINSIC STRESS IN DIAMOND FILM GROWTH BY HOT-FILAMENT CVD

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 1998, 18(3): 67-69

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