Factors and Mechanisms Influencing Granularity Uniformity of Nano-sized &gamma;-Al<sub>2</sub>O<sub>3</sub> Abrasives for preparing CMP

Factors and Mechanisms Influencing Granularity Uniformity of Nano-sized γ-Al₂O₃ Abrasives for preparing CMP

HE Han-wei, HU Yue-hua, HUANG Ke-long, XU Jing

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Mining and Metallurgical Engineering ›› 2002, Vol. 22 ›› Issue (1) : 42-45.

Factors and Mechanisms Influencing Granularity Uniformity of Nano-sized γ-Al₂O₃ Abrasives for preparing CMP

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2002, 22(1): 42-45

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