Effect of Substrate Temperature on Texture and Structure of AlN Thin Films Deposited by DC Magnetron Sputtering

LIU Xin-sheng, ZHOU Ling-ping, MEN Hai-quan, LI De-yi, LI Shao-lu

Mining and Metallurgical Engineering ›› 2007, Vol. 27 ›› Issue (3) : 82-85.

PDF(895 KB)
PDF(895 KB)
Mining and Metallurgical Engineering ›› 2007, Vol. 27 ›› Issue (3) : 82-85.

Effect of Substrate Temperature on Texture and Structure of AlN Thin Films Deposited by DC Magnetron Sputtering

    {{javascript:window.custom_author_en_index=0;}}
  • {{article.zuoZhe_EN}}
Author information +
History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations
{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2007, 27(3): 82-85

References

List( Publishing order | Descend order by publishing year | Descend order by cited within ) Chart analysis

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}
{{article.copyrightLicense_en}}
PDF(895 KB)

Accesses

Citation

Detail
Sections
Recommended
Copyright © Mining and Metallurgical Engineering, All Rights Reserved.
Tel: 0731-88657070/88657176/88657173　
Fax: 0731-88657186　
Powered by Beijing Magtech Co. Ltd.

/

〈 〉